The TDK ICP-101xx pressure sensor family is based on MEMS capacitive technology which provides ultra-low noise at the lowest power, enabling industry leading relative accuracy, sensor throughput, and temperature stability.
Capacitive pressure sensing technology overcomes many of the challenges of the previous piezo resistive technology and improves overall performance. Below is a comparison of the 2 architectures:
The capacitive pressure sensor architectural advantage enables unparalleled levels of ultra-low noise and power beyond what piezo resistive sensors can deliver. Below is a chart of noise and power of TDK’s ICP-101xx capacitive pressure family vs common industry piezo resistive pressure sensors at an output data rate of 1Hz:
The ICP-101xx pressure sensor family has a noise floor under 0.4Pa-rms enabling pressure measurement differences of less than ±1 Pa, an accuracy enabling altitude measurement differentials as small as 5 cm, less than the height of a single stair step.
Capacitive pressure sensors are inherently more stable over temperature than piezo resistive based sensors since piezo resistors are highly sensitive to temperature variation. The ICP-101xx pressure sensor family achieves an industry leading temperature coefficient offset of ±0.5 Pa/°c making the device extremely stable over a wide temperature range.
TDK’s capacitive pressure sensors, with ultra-low noise, ultra-low power, and temperature stability bring a new level of performance enabling new use cases not possible with incumbent piezo resistive technology.
|Application||New Use Cases|
|Wearable||Improved motion tracking enabling activity identification and better caloric counting||Mobile||Improved path of travel identification (stairs, escalator, elevator) provides improved indoor map routing and travel times, E911|
|Drones||Improved altitude-hold and stability over a wide temp range enable a more stable flight control user experience|
|Datacom and Personal Inhalation Devices||Sub pascal noise floor enables low threshold and high accuracy air flow measurement in a low profile package|
|Security Systems||Measure vertical window displacement based on pressure instead of easily defeated accelerometers and reed switches|