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An Impedance analyzer can measure the capacitance in parallel known as p or in series known as Cs*. The circuit model will be depending on the value of capacitance of the capacitor (see Figure 1).
When C is small and impedance is high, parallel impedance between C and Rp will become significantly higher than. Thus the meter setting for measuring capacitance should be Cp. Since C is low capacitance capacitor, Cp setting will be used not Cs.
Figure 1 : Impedance equivalment circuit
* HP4291A RF Impedance/Material Analyzer Operating Manual Set, Hewlett-Packard Japan, LTD, 1993