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When meter uses the fixture to measure the capacitor, all the residual and stray parameters will be calculated into the capacitor measurement. Residual and stray parameters will cause measurement errors. Therefore, it is important to compensate these residual and stray parameters.
Compensation includes 3 steps. Open, short, and load compensation. Open compensation can remove the parasitic admittance of the fixture. Short compensation can remove the impedance of the fixture. Load compensation sets the reference point for 50Ω load measurement.
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